High-Resolution Mems Inclinometer Based on Pull-In Voltage

AuthID
P-00H-T1B
5
Author(s)
Alves, FS
·
Dias, RA
·
Gaspar, J
·
Document Type
Article
Year published
2015
Published
in Journal of Microelectromechanical Systems, ISSN: 1057-7157
Volume: 24, Issue: 4, Pages: 931-939
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-85028229738
Source Identifiers
ISSN: 1057-7157
Export Publication Metadata
Marked List
Info
At this moment we don't have any links to full text documens.