Development and Test of a Profilometer Based on a Low-Cost White-Light Bench Microscope with a Linear Sensor

AuthID
 P-00H-X8V
3
Author(s)
3
Editor(s)
Ottevaere, Heidi; DeWolf, Peter; Wiersma, Diederik S.
Document Type
Proceedings Paper
Year published
2005
Published
in Nano- and Micro-Metrology
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