Substrate Effect On The Electrical-Properties Of A-Si-H Thin-Films And Its Modification By Diffusion-Blocking Interlayers

AuthID
 P-001-SK1
6
Author(s)
BREGMAN, J
·
GORDON, J
·
SHAPIRA, Y
·
MARTINS, R
·
GUIMARAES, L
Document Type
Article
Year published
1989
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, ISSN: 0734-2101
Volume: 7, Issue: 4, Pages: 2628-2631 (4)
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Publication Identifiers
Wos: WOS:A1989AG67700018
Source Identifiers
ISSN: 0734-2101
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