Ion Damage Overrides Structural Disorder in Silicon Surface Nanopatterning by Low-Energy Ion Beam Sputtering

AuthID
 P-00J-0V9
8
Author(s)
Gago, R
·
Vázquez, L
·
Muñoz-García, J
·
Cuerno, R
·
Castro, M
Document Type
Article
Year published
2015
Published
in EPL - EPL (Europhysics Letters), ISSN: 0295-5075
Volume: 109, Issue: 4, Pages: 48003
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ISSN: 0295-5075
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