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Self-Organized Nanopatterning of Silicon Surfaces by Ion Beam Sputtering
AuthID
P-00J-FND
7
Author(s)
Muñoz-García, J
·
Vázquez, L
·
Castro, M
·
Gago, R
·
Redondo-Cubero, A
·
Moreno-Barrado, A
·
Cuerno, R
Document Type
Article
Year published
2014
Published
in
Materials Science and Engineering: R: Reports,
ISSN: 0927-796X
Volume: 86, Pages: 1-44
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Publication Identifiers
DOI
:
10.1016/j.mser.2014.09.001
Source Identifiers
ISSN
: 0927-796X
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