Dopant Transfer from Poly-Si Thin Films to C-Si: An Alternative Technique for Device Processing

AuthID
 P-00J-ZSY
4
Author(s)
Ricardo, L
·
Nunes de Carvalho, CN
·
Document Type
Article
Year published
2016
Published
in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001
Volume: 42, Pages: 210-214 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-84975684121
Wos: WOS:000367638200011
Source Identifiers
ISSN: 1369-8001
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