Electrical Levels and Diffusion Barriers of Early 3D and 4D Transition Metals in Silicon

AuthID
P-00K-2D6
3
Author(s)
1
Editor(s)
Pichler P.Pichler P.
Document Type
Proceedings Paper
Year published
2016
Published
in Solid State Phenomena, ISSN: 1662-9779
Volume: 242, Pages: 264-270
Conference
16Th International Conference on Gettering and Defect Engineering in Semiconductor Technology, Gadest 2015, Date: 20 September 2015 through 25 September 2015
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Publication Identifiers
Scopus: 2-s2.0-84953931467
Source Identifiers
ISSN: 1662-9779
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