Dynamics of Hydrogenated Amorphous Silicon Flexural Resonators for Enhanced Performance

AuthID
 P-00K-F24
3
Author(s)
Mouro, J
·
Document Type
Article
Year published
2016
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 119, Issue: 15, Pages: 154501 (11)
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Publication Identifiers
SCOPUS: 2-s2.0-84966728198
Wos: WOS:000378991800022
Source Identifiers
ISSN: 0021-8979
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