in Materials, Integration and Technology for Monolithic Instruments in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 869, Pages: 45-50 (6)
Conference
Symposium on Materials, Integration and Technology for Monolithic Instruments Held at the 2005 Mrs Spring Meeting, Date: MAR 29-30, 2005, Location: San Francisco, CA, Sponsors: Mat Res Soc
