Electrical Characterization of Thin-Film Silicon Flexural Resonators in Linear and Nonlinear Regimes of Motion for Integration with Electronics

AuthID
 P-00K-N46
5
Author(s)
Mouro, J
·
Teagno, L
·
Gualdino, A
·
Document Type
Article
Year published
2016
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 247, Pages: 482-493 (12)
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Publication Identifiers
SCOPUS: 2-s2.0-84978224601
Wos: WOS:000383828100056
Source Identifiers
ISSN: 0924-4247
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