Tuning the Afterglow Plasma Composition in Ar/N-2/O-2 Mixtures: Characteristics of a Flowing Surface-Wave Microwave Discharge System

AuthID
 P-00M-409
4
Author(s)
Kutasi, K
·
Noel, C
·
Belmonte, T
·
Document Type
Article
Year published
2016
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 25, Issue: 5, Pages: 055014 (16)
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-84991755914
Wos: WOS:000384000400007
Source Identifiers
ISSN: 0963-0252
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