Self-Organised Silicide Nanodot Patterning by Medium-Energy Ion Beam Sputtering of Si (100): Local Correlation Between the Morphology and Metal Content

AuthID
P-00M-542
8
Author(s)
Galiana, B
·
Palomares, FJ
·
Bahena, D
·
Ballesteros, C
·
Hernandez Calderon, I
·
Vazquez, L
Document Type
Article
Year published
2016
Published
in NANOTECHNOLOGY, ISSN: 0957-4484
Volume: 27, Issue: 44, Pages: 444001 (11)
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Publication Identifiers
Scopus: 2-s2.0-84991358709
Wos: WOS:000385487100001
Source Identifiers
ISSN: 0957-4484
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