Laser Patterning of Amorphous Silicon Thin Films Deposited on Flexible and Rigid Substrates

AuthID
P-00M-5BS
5
Author(s)
Iglesias, V
·
Machado, G
·
Borme, J
Document Type
Article
Year published
2016
Published
in PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, ISSN: 1862-6300
Volume: 213, Issue: 7, Pages: 1717-1727 (11)
Conference
26Th International Conference of Amorphous and Nanocrystalline Semiconductors, Date: 2015, Location: Aachen, GERMANY, Sponsors: Forschungszentrum Julish GmbH, RWTH Aachen Univ, Tech Univ Munich, Walter Schottky Int, Helmholtz Ctr Berlin, PINK GmbH Thermosysteme, FAP Forschungs & Applikat Plasmatechnik GmbH, ScientaOmicron GmbH, PV Lab IMT Neuchatel, Automat Syst GmbH & Co KG
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Publication Identifiers
SCOPUS: 2-s2.0-84957553690
Wos: WOS:000385222900011
Source Identifiers
ISSN: 1862-6300
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