Low-Temperature Deposition of Nanocrystalline Diamond Films on Silicon Nitride Substrates Using Distributed Antenna Array Pecvd System

AuthID
 P-00M-8Z6
6
Author(s)
Baudrillart, B
·
Benedic, F
·
Melouani, AS
·
Achard, J
Document Type
Article
Year published
2016
Published
in PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, ISSN: 1862-6300
Volume: 213, Issue: 10, Pages: 2575-2581 (7)
Indexing
Wos®
Scopus®
Crossref®15
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84978042706
Wos: WOS:000388321500005
Source Identifiers
ISSN: 1862-6300
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