Mems Microbridge Deflection Monitoring Using Integrated Spin Valve Sensors and Micromagnets

AuthID
P-00M-NVX
5
Author(s)
Li, H
·
Gaspar, J
·
10
Editor(s)
Fidler,J;Hillebrands,B;Ross,C;Weller,D;Folks,L;Hill,E;Villalabeitia,M;Bain,JA;Boeck,J;Wood,R
Document Type
Proceedings Paper
Year published
2002
Published
in INTERMAG Europe 2002 - IEEE International Magnetics Conference
Conference
2002 Ieee International Magnetics Conference, Intermag Europe 2002, Date: 28 April 2002 through 2 May 2002
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Publication Identifiers
SCOPUS: 2-s2.0-85017236278
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