Fluid Modelling of Capacitively Coupled Radio-Frequency Discharges: a Review

AuthID
P-002-2RS
2
Author(s)
Document Type
Article
Year published
2012
Published
in PLASMA PHYSICS AND CONTROLLED FUSION, ISSN: 0741-3335
Volume: 54, Issue: 12, Pages: 124012 (8)
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Publication Identifiers
SCOPUS: 2-s2.0-84870231210
Wos: WOS:000312579500015
Source Identifiers
ISSN: 0741-3335
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