Self-Consistent Depth Profiling and Imaging of Gan-Based Transistors Using Ion Microbeams

AuthID
 P-00M-Y8J
4
Author(s)
Vázquez, L
·
Alves, LC
Document Type
Article
Year published
2015
Published
in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 348, Pages: 246-250
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Publication Identifiers
Scopus: 2-s2.0-85027939295
Source Identifiers
ISSN: 0168-583X
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