Thermal Stability of Zr-O-N(:Ti) Thin Films Prepared by Magnetron Sputtering

AuthID
 P-00N-MWE
6
Author(s)
da Silva Oliveira, CI
·
Martinez Martinez, D
·
Apreutesei, M
·
Rampelberg, G
·
Detavernier, C
·
Document Type
Article
Year published
2018
Published
in VACUUM, ISSN: 0042-207X
Volume: 151, Pages: 148-155 (8)
Indexing
Wos®
Scopus®
Crossref®7
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85042175795
Wos: WOS:000430034600020
Source Identifiers
ISSN: 0042-207X
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