Arrays of Suspended Silicon Nanowires Defined by Ion Beam Implantation: Mechanical Coupling and Combination with Cmos Technology

AuthID
 P-00N-NNA
7
Author(s)
Llobet, J
·
Rius, G
·
Borrise, X
·
Koops, R
·
van Veghel, M
·
Perez Murano, F
Document Type
Article
Year published
2018
Published
in NANOTECHNOLOGY, ISSN: 0957-4484
Volume: 29, Issue: 15
Indexing
Wos®
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85042711018
Wos: WOS:000425999000002
Source Identifiers
ISSN: 0957-4484
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