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Energy Efficient Micro-Machined Thermal Flow-Rate Sensor Based on Transient Operation Mode

AuthID
P-00P-34Q

Author(s)

Shaun, F

Sarkar, S

Ali, H

Poulichet, P

Peressutti, F

Marty, F

Bourouina, T

Nefzaoui, E

Oliveira, JP

Editor(s)

Marcelli,R;Mita,Y;Smith,S;Pressecq,F;Nouet,P;Mailly,F;Schneider,P

Document Type

Proceedings Paper

Year published

2018

Published

in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

Pages: 1-3

Conference

20Th Symposium on Design, Test, Integration and Packaging of Mems and Moems, Dtip 2018, Date: 22 May 2018 through 25 May 2018, Sponsors: ARTOV.IMM.CNR.IT;CMP.IMAG.FR;CNRS.FR;EPS.IEEE.ORG;LIRMM.FR

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Metadata
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Publication Identifiers

DOI: 10.1109/dtip.2018.8394233

SCOPUS: 2-s2.0-85050248716

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Energy Efficient Micro-Machined Thermal Flow-Rate Sensor Based on Transient Operation Mode

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