Electrical Properties of Alnxoy Thin Films Prepared by Reactive Magnetron Sputtering

AuthID
 P-002-6T3
9
Author(s)
Martin, N
·
Beaufort, MF
·
Riviere, JP
·
·
Document Type
Article
Year published
2012
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 520, Issue: 21, Pages: 6709-6717 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-84864770187
Wos: WOS:000307286100048
Source Identifiers
ISSN: 0040-6090
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