A Simulation-Based Framework For Industrial Automated Wet-Etch Station Scheduling Problems In The Semiconductor Industry

AuthID
 P-00P-619
4
Author(s)
Aguirre, AM
·
Cafaro, VG
·
Castro, PM
6
Editor(s)
Bruzzone, AG; Piera, MA; Longo, F; Elfrey, P; Affenzeller, M; Balci, O
Document Type
Proceedings Paper
Year published
2011
Published
in 23RD EUROPEAN MODELING & SIMULATION SYMPOSIUM, EMSS 2011
Pages: 384-393 (10)
Conference
23Rd European Modeling and Simulation Symposium / International Mediterranean and Latin American Modeling Multiconference, Date: SEP 12-14, 2011, Location: Rome, ITALY, Sponsors: Univ Genoa, DIPTEM, Liophant Simulat, Simulat Team, Int Mediterranean & Latin Amer Counc Simulat, Univ Calabria, Mech Dept, Model & simulat Ctr, Lab Enterprise Solut, Model & Simulat Ctr Excellence, Riga Tech Univ, Miss Latvian Ctr, Logism, Lab Sci Informat & Syst, Univ Perugia, LAMCE COPPE UFRJ, Brasilian Ctr, McLeod Inst Simulat Sci, McLeod Model & Simulat Network, Latvin Simulat Soc, Ecole Superieure Ingn Soc Appliquees, FAC CIENCIAS EXACTAS, Ingn & Agrimensura, Univ Laguna, CIFASIS CONICET UNR UPCAM, Inst Syst & Technol Informat Control & Commun, PRESAGIS
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Wos: WOS:000367406100057
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