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Capacitively Coupled Radio-Frequency Discharges in Nitrogen at Low Pressures
AuthID
P-002-7B2
10
Author(s)
Alves, LL
·
Marques, L
·
Pintassilgo, CD
·
Wattieaux, G
·
Es sebbar, E
·
Berndt, J
·
Kovacevic, E
·
Carrasco, N
·
Boufendi, L
·
Cernogora, G
Document Type
Article
Year published
2012
Published
in
PLASMA SOURCES SCIENCE & TECHNOLOGY,
ISSN: 0963-0252
Volume: 21, Issue: 4, Pages: 045008 (19)
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®
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Publication Identifiers
DOI
:
10.1088/0963-0252/21/4/045008
SCOPUS
: 2-s2.0-84864701755
Wos
: WOS:000307307600011
Source Identifiers
ISSN
: 0963-0252
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