Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

AuthID
P-002-7YP
3
Author(s)
Szilagyi, E
Document Type
Article
Year published
2012
Published
in ANALYTICAL CHEMISTRY, ISSN: 0003-2700
Volume: 84, Issue: 14, Pages: 6061-6069 (9)
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Publication Identifiers
Pubmed: 22681761
Scopus: 2-s2.0-84863957489
Wos: WOS:000306441200034
Source Identifiers
ISSN: 0003-2700
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