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Property Change in Zrnxoy Thin Films: Effect of the Oxygen Fraction and Bias Voltage
AuthID
P-000-79J
10
Author(s)
Vaz, F
·
Carvalho, P
·
Cunha, L
·
Rebouta, L
·
Moura, C
·
Alves, E
·
Ramos, AR
·
Cavaleiro, A
·
Goudeau, P
·
Riviere, JP
Document Type
Article
Year published
2004
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 469, Issue: SPEC. ISS., Pages: 11-17 (7)
Conference
31St International Conference on Metallurgical Coatings and Thin Films,
Date:
APR 19-23, 2004,
Location:
San Diego, CA,
Sponsors:
AVS Sci & Technol Soc, Adv Surface Engn Div
Indexing
Wos
®
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Crossref
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Metadata
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Publication Identifiers
DOI
:
10.1016/j.tsf.2004.06.191
SCOPUS
: 2-s2.0-10044279236
Wos
: WOS:000225724300004
Source Identifiers
ISSN
: 0040-6090
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