Raman Analysis of Si-C-N Films Grown by Reactive Magnetron Sputtering

AuthID
 P-000-79P
5
Author(s)
Liang, EJ
·
Zhang, JW
·
Leme, J
·
Document Type
Article
Year published
2004
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 469, Issue: SPEC. ISS., Pages: 410-415 (6)
Conference
31St International Conference on Metallurgical Coatings and Thin Films, Date: APR 19-23, 2004, Location: San Diego, CA, Sponsors: AVS Sci & Technol Soc, Adv Surface Engn Div
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Publication Identifiers
SCOPUS: 2-s2.0-10044272974
Wos: WOS:000225724300070
Source Identifiers
ISSN: 0040-6090
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