Advanced Run-To-Run Controller in Semiconductor Manufacturing with Real-Time Equipment Condition Apc: Advanced Process Control; Am: Advanced Metrology

AuthID
 P-00P-VBB
5
Author(s)
Yang, WT
·
Blue, J
·
Roussy, A
·
Pinaton, J
Document Type
Proceedings Paper
Year published
2018
Published
in 2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) in Advanced Semiconductor Manufacturing Conference and Workshop-Proceedings, ISSN: 1078-8743
Pages: 346-352 (7)
Conference
29Th Annual Semi Advanced Semiconductor Manufacturing Conference (Asmc), Date: APR 30-MAY 03, 2018, Location: Saratoga Springs, NY
Indexing
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Publication Identifiers
Scopus: 2-s2.0-85048864111
Wos: WOS:000448893500075
Source Identifiers
ISSN: 1078-8743
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