Electrical Properties of Indium-Oxide Thin Films Produced by Plasma-Enhanced Reactive Thermal Evaporation

AuthID
P-00P-VG6
4
Author(s)
Ilin, AS
·
Matsukatova, AN
·
Forsh, PA
·
Document Type
Article
Year published
2018
Published
in SEMICONDUCTORS, ISSN: 1063-7826
Volume: 52, Issue: 12, Pages: 1638-1641 (4)
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Publication Identifiers
Scopus: 2-s2.0-85056143788
Wos: WOS:000449544500025
Source Identifiers
ISSN: 1063-7826
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