Reliability and Stability of Thin-Film Amorphous Silicon Mems Resonators

AuthID
 P-002-9K7
3
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Document Type
Article
Year published
2012
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 22, Issue: 6, Pages: 065030 (8)
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Wos: WOS:000304609600030
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ISSN: 0960-1317
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