Publications

AuthID
P-00Q-F2N

Author(s)

Mendes, P

Schwaiger, S

Scholz, F

Magalhaes, S

Document Type

Article

Year published

2019

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 98, Pages: 95-99 (5)

Indexing

Wos^®

Scopus^®

Crossref^®15

Handle^®

Google Scholar^®

Publication Identifiers

DOI: 10.1016/j.mssp.2019.04.001

Handle: https://hdl.handle.net/10451/49139

Scopus: 2-s2.0-85063759927

Wos: WOS:000465188500016

Source Identifiers

ISSN: 1369-8001

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