Experimental Observation of the Confinement of Atomic Collision Cascades During Ion Sputtering of Porous Silicon

AuthID
P-00Q-H6K
5
Author(s)
Ieshkin, AE
·
Svyakhovskiy, SE
·
Drozdov, MN
·
Pelenovich, VO
Document Type
Article
Year published
2019
Published
in TECHNICAL PHYSICS LETTERS, ISSN: 1063-7850
Volume: 45, Issue: 1, Pages: 37-40 (4)
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Publication Identifiers
Scopus: 2-s2.0-85064938816
Wos: WOS:000468547200011
Source Identifiers
ISSN: 1063-7850
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