Small Size and Highly Sensitive Differential Mems Accelerometer Based on Double-Ended Tuning Fork Resonators

AuthID
 P-00R-1F3
4
Author(s)
Moreira, EE
·
Kuhlmann, B
·
Document Type
Proceedings Paper
Year published
2019
Published
in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Pages: 602-605
Conference
20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Sponsors: Electron Devices Society (EDS);Hahn-Schickard;IEEE
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Publication Identifiers
SCOPUS: 2-s2.0-85071951258
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