A Large-Volume N-2-Ar Microwave Plasma Source Based on Surface Waves

AuthID
 P-000-7RW
4
Author(s)
1
Editor(s)
Guerassimov N.Karpozov D.
Document Type
Article
Year published
2004
Published
in VACUUM, ISSN: 0042-207X
Volume: 76, Issue: 2-3, Pages: 343-346 (4)
Conference
13Th International Summer School on Vacuum, Electron and Ion Technologies, Date: SEP 15-19, 2003, Location: Varna, BULGARIA, Sponsors: Bulgarian Acad Sci, Inst Elect, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, FZR, Fdn Evrika
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Publication Identifiers
SCOPUS: 2-s2.0-7044239172
Wos: WOS:000224890100052
Source Identifiers
ISSN: 0042-207X
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