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Determination of the Electron Density in Current-Less Argon Plasma Using Langmuir Probe Measurements

AuthID
P-000-7RZ

Author(s)

Popov, TK

Dimitrova, M

Dias, FM

Editor(s)

Guerassimov N.Karpozov D.

Document Type

Article

Year published

2004

Published

in VACUUM, ISSN: 0042-207X

Volume: 76, Issue: 2-3, Pages: 417-420 (4)

Conference

13Th International Summer School on Vacuum, Electron and Ion Technologies, Date: SEP 15-19, 2003, Location: Varna, BULGARIA, Sponsors: Bulgarian Acad Sci, Inst Elect, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, FZR, Fdn Evrika

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Publication Identifiers

DOI: 10.1016/j.vacuum.2004.07.079

SCOPUS: 2-s2.0-7044234714

Wos: WOS:000224890100068

Source Identifiers

ISSN: 0042-207X

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Determination of the Electron Density in Current-Less Argon Plasma Using Langmuir Probe Measurements

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Determination of the Electron Density in Current-Less Argon Plasma Using Langmuir Probe Measurements

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