Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors

AuthID
 P-00R-PSD
14
Author(s)
Abdelhameed, AH
·
Angloher, G
·
Bauer, P
·
Bertoldo, E
·
Canonica, L
·
Fuchs, D
·
Hauff, D
·
Iachellini, NF
·
Mancuso, M
·
Petricca, F
·
Probst, F
·
Riesch, J
·
Rothe, J
Document Type
Article
Year published
2020
Published
in JOURNAL OF LOW TEMPERATURE PHYSICS, ISSN: 0022-2291
Volume: 199, Issue: 1-2, Pages: 401-407 (7)
Indexing
Wos®
Scopus®
Crossref®7
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85078886728
Wos: WOS:000510367900010
Source Identifiers
ISSN: 0022-2291
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