Publications

Improve Simulation Tool Integrating Heterogeneous Simulation Modules for Semiconductor Manufacturing Processes

AuthID
P-002-FA7

Author(s)

Almeida, N

Pires, J

Sora, D

Document Type

Proceedings Paper

Year published

2012

Published

in 2012 23RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) in Advanced Semiconductor Manufacturing Conference and Workshop-Proceedings, ISSN: 1078-8743

Pages: 170-174 (5)

Conference

23Rd Annual Semi Advanced Semiconductor Manufacturing Conference (Asmc), Date: MAY 15-17, 2012, Location: Saratoga Springs, NY, Sponsors: Appl Mat, ATMI, CH2MHILL, ChemTrace Analyt Testings & Solut, CNW, Edwards, Greene Tweed, Mentor Graph, KLA Tencor, Nikon, NY Nanotech, Synopsys, Valqua Amer Inc, Saratoga Convent & Tourism Bur, Saratoga Econom Dev Corp (SEDC), IEEE, IEEE, Elect Devices Soc (EDS), IEEE, Components, Packaging & Mfg Technol Soc (CPMT)

Indexing