A Physics-Informed Run-To-Run Control Framework for Semiconductor Manufacturing

AuthID
 P-00S-5SK
5
Author(s)
Yang, WT
·
Blue, J
·
Roussy, A
·
Pinaton, J
·
Document Type
Article
Year published
2020
Published
in EXPERT SYSTEMS WITH APPLICATIONS, ISSN: 0957-4174
Volume: 155, Pages: 113424 (18)
Indexing
Wos®
Scopus®
Crossref®11
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85084931453
Wos: WOS:000542127900003
Source Identifiers
ISSN: 0957-4174
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

footer slogan

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service