A Physics-Informed Run-To-Run Control Framework for Semiconductor Manufacturing

AuthID
 P-00S-5SK
5
Author(s)
Yang, WT
·
Blue, J
·
Roussy, A
·
Pinaton, J
·
Document Type
Article
Year published
2020
Published
in EXPERT SYSTEMS WITH APPLICATIONS, ISSN: 0957-4174
Volume: 155, Pages: 113424 (18)
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Publication Identifiers
SCOPUS: 2-s2.0-85084931453
Wos: WOS:000542127900003
Source Identifiers
ISSN: 0957-4174
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