Low Peak Power Deposition Regime in Hipims: Deposition of Hard and Dense Nanocomposite Ti-Si-N Films by Doms Without the Need of Energetic Bombardment

AuthID
 P-00S-8BE
5
Author(s)
Fernandes, F
·
Calderon, VS
·
Ferreira, PJ
·
Document Type
Article
Year published
2020
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 397, Pages: 125996 (12)
Indexing
Wos®
Scopus®
Crossref®17
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85085840337
Wos: WOS:000543496400029
Source Identifiers
ISSN: 0257-8972
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