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Small-Size Mems Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

AuthID
P-00S-8KK

Author(s)

Lima, V

Cabral, J

Kuhlmann, B

Gaspar, J

Rocha, LA

Document Type

Proceedings Paper

Year published

2020

Published

in INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

7Th Ieee International Symposium on Inertial Sensors and Systems, Inertial 2020, Date: 23 March 2020 through 26 March 2020, Sponsors: IEEE Sensors Council

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Publication Identifiers

DOI: 10.1109/inertial48129.2020.9090096

Scopus: 2-s2.0-85085473462

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Small-Size Mems Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

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