Synthesis and Structural Properties of Mo-S-N Sputtered Coatings

AuthID
P-00S-9EM
7
Author(s)
Kannur, KH
·
Bin Yaqub, T
·
Huminiuc, T
·
Polcar, T
·
Pupier, C
·
Heau, C
·
Document Type
Article
Year published
2020
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 527, Pages: 146790 (13)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-85086011817
Wos: WOS:000564451100006
Source Identifiers
ISSN: 0169-4332
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