Publications

Silicon Nitride Based Devices: Lithographic Mask Roughness Mitigation

AuthID
P-00S-CAX

Author(s)

Lourenço, P

Fantoni, A

Costa, J

Vieira, M

Editor(s)

Baets,RG;O'Brien,P;Vivien,L

Document Type

Proceedings Paper

Year published

2020

Published

in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X

Volume: 11364

Conference

Integrated Photonics Platforms 2020: Fundamental Research, Manufacturing and Applications, Date: 6 April 2020 through 10 April 2020, Sponsors: City of Strasbourg;CNRS;et al.;Eurometropole;Region Grand Est;The Society of Photo-Optical Instrumentation Engineers (SPIE)

Indexing