Tunable Mechanical Property and Structural Transition of Silicon Nitride Nanowires Induced by Focused Ion Beam Irradiation

AuthID
P-00S-FWW
5
Author(s)
Wei, B
·
Deng, QS
·
Ji, Y
·
Han, XD
Document Type
Article
Year published
2020
Published
in ACS APPLIED MATERIALS & INTERFACES, ISSN: 1944-8244
Volume: 12, Issue: 28, Pages: 32175-32181 (7)
Indexing
Publication Identifiers
Pubmed: 32551486
Scopus: 2-s2.0-85088246437
Wos: WOS:000551488400113
Source Identifiers
ISSN: 1944-8244
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