A Novel Optimization Method to Automated Wet-Etch Station Scheduling in Semiconductor Manufacturing Systems

AuthID
 P-002-HR1
3
Author(s)
Aguirre, AM
·
Mendez, CA
·
Document Type
Article
Year published
2011
Published
in COMPUTERS & CHEMICAL ENGINEERING, ISSN: 0098-1354
Volume: 35, Issue: 12, Pages: 2960-2972 (13)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-80052845471
Wos: WOS:000296871800031
Source Identifiers
ISSN: 0098-1354
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

footer slogan

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service