Realizing the Potential of Rf-Sputtered Hydrogenated Fluorine-Doped Indium Oxide as an Electrode Material for Ultrathin Siox/Poly-Si Passivating Contacts

AuthID
P-00S-WFQ
11
Author(s)
Han, C
·
Yang, GT
·
Montes, A
·
Procel, P
·
Mazzarella, L
·
Zhao, YF
·
Eijt, S
·
Schut, H
·
Zhang, XD
·
Zeman, M
·
Document Type
Article
Year published
2020
Published
in ACS APPLIED ENERGY MATERIALS, ISSN: 2574-0962
Volume: 3, Issue: 9, Pages: 8606-8618 (13)
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Publication Identifiers
Wos: WOS:000576676900054
Source Identifiers
ISSN: 2574-0962
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