Influence of Nitrogen Impurities on the Formation of Active Species in Ar-O-2 Plasmas

AuthID
 P-002-K38
4
Author(s)
·
Document Type
Article
Year published
2011
Published
in EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, ISSN: 1286-0042
Volume: 56, Issue: 2, Pages: 24004 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-80555138767
Wos: WOS:000296772200004
Source Identifiers
ISSN: 1286-0042
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