Effect of the Substrate Biasing on the Structure and Properties of Tantalum Coatings Deposited Using Hipims in Deep Oscillations Magnetron Sputtering Mode

AuthID
 P-00T-5EY
3
Author(s)
Ferreira, F
·
Document Type
Article
Year published
2020
Published
in METALS, ISSN: 2075-4701
Volume: 10, Issue: 12, Pages: 1-9 (9)
Indexing
Wos®
Scopus®
Crossref®6
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85097222921
Wos: WOS:000602400700001
Source Identifiers
ISSN: 2075-4701
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