The Influence of the Deposition Pressure on the Composition and the Mechanical Properties of W-S-C Coatings Deposited by Magnetron Sputtering in Semi-Industrial Conditions

AuthID
P-00T-69Z
3
Author(s)
Vuchkov, T
·
Bin Yaqub, T
·
Document Type
Article
Year published
2021
Published
in VACUUM, ISSN: 0042-207X
Volume: 184, Pages: 109963 (4)
Indexing
Publication Identifiers
Scopus: 2-s2.0-85097341401
Wos: WOS:000604845700002
Source Identifiers
ISSN: 0042-207X
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