Electro-Mechanical Co-Optimization of Mems Devices in Python

AuthID
 P-00T-9MY
4
Author(s)
Esteves, R
·
Wang, C
·
Kraft, M
Document Type
Proceedings Paper
Year published
2020
Published
in 2020 IEEE SENSORS in IEEE Sensors, ISSN: 1930-0395
Volume: 2020-October
Conference
Ieee Sensors Conference, Date: OCT 25-28, 2020, Location: ELECTR NETWORK, Sponsors: IEEE, IEEE Sensors Council
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Publication Identifiers
SCOPUS: 2-s2.0-85098721008
Wos: WOS:000646236300151
Source Identifiers
ISSN: 1930-0395
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