Sputter Deposition of Thin Films on Different Substrate Materials Analyzed by Means of Modulated Ir Radiometry

AuthID
 P-002-PM2
8
Author(s)
Chotikaprakhan, S
·
Kijamnajsuk, P
·
·
Gibkes, J
·
Pelzl, J
·
Bein, BK
Document Type
Article
Year published
2011
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 205, Issue: SUPPL. 2, Pages: S204-S208 (5)
Conference
12Th International Conference on Plasma Surface Engineering, Date: SEP 13-17, 2010, Location: Garmisch-Partenkirchen, GERMANY
Indexing
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Handle®
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Publication Identifiers
Scopus: 2-s2.0-79959798634
Wos: WOS:000293258600043
Source Identifiers
ISSN: 0257-8972
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