Role of Sublimation Kinetics of Ammonia Borane in Chemical Vapor Deposition of Uniform, Large-Area Hexagonal Boron Nitride

AuthID
 P-00V-3YY
8
Author(s)
Sompalle, B
·
Liao, CD
·
Wei, B
·
Nicoara, N
·
Wang, ZC
·
Sadewasser, S
·
Document Type
Article
Year published
2021
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 39, Issue: 4
Indexing
Wos®
Scopus®
Crossref®3
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85108604423
Wos: WOS:000665103000001
Source Identifiers
ISSN: 0734-2101
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